Laser Micromachined Moiré Pattern Strain Sensors on Polymer Membrane
Sarbojit Mukherjee, Somnath Pandit, R Hemant Kumar, Khanindra Pathak, and Shivakiran Bhaktha B.N.
Dec 2022
Moiré technique is one of the highly sensitive non-contact method to measure surface deformations due to strain. In literature, Moiré patterns are made using holographic photolithography, electron beam lithography, focused ion beam (FIB) lithography and nanoimprint lithography (NIL). Some of these techniques need very expensive and precise equipments like vibration isolation platform, nano stage, which makes fabrication and mass manufacturing difficult. Here, we propose picosecond laser micromachining as a reliable technique for embedding optical microstructures such as gratings at various depths of a material. The proposed membranes can be used as strain sensors for health monitoring of various structures, importantly in underground mines wherein all-optical sensors are in great demand.